● Low particle
The amount of attached particle is ultra low.
This is directly available in a cleanroom. This does not bring contaminated matters into a cleanroom.
● Vacuum-supported
A material with which outgas production in a vacuum environment is small is used.
If misalignment becomes larger due to vacuum pressure difference,MOHS MOP, for which larger misalignment is permitted, are recommended.
● Less outgas
Materials with which production of outgas that causes chemical contamination under atmospheric environment is small are used.
● Heat resistant
This is available even in an environment of high temperature（ 80℃ or higher）
Elongation or deflection of a shaft associated with thermal expansion may increase misalignment. If misalignment becomes larger, MOHS MOP, for which larger misalignment is permitted, is recommended.
● Chemical resistant
Materials superior in chemical resistance are used.